Microhotplate temperature sensor calibration and BIST
نویسندگان
چکیده
منابع مشابه
Microhotplate Temperature Sensor Calibration and BIST
In this paper we describe a novel long-term microhotplate temperature sensor calibration technique suitable for Built-In Self Test (BIST). The microhotplate thermal resistance (thermal efficiency) and the thermal voltage from an integrated platinum-rhodium thermocouple were calibrated against a freshly calibrated four-wire polysilicon microhotplate-heater temperature sensor (heater) that is not...
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ژورنال
عنوان ژورنال: Journal of Research of the National Institute of Standards and Technology
سال: 2011
ISSN: 1044-677X
DOI: 10.6028/jres.116.025